CMOS-MEMS integration: Why, how and what?

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD

Volumn , Issue , 2006, Pages 826-827

  Witvrouw, Ann ^a  

^a IMEC   (Belgium)

Author keywords

CMOS MEMS integration; Poly SiGe; Technology

Indexed keywords

COMPOSITE MICROMECHANICS; DESIGN; ELECTROMECHANICAL DEVICES; MEMS; POLYSILICON; SEMICONDUCTING GERMANIUM COMPOUNDS; SILICON ALLOYS;

CASE STUDIES; CMOS-MEMS; COMPUTER-AIDED DESIGN; INTERNATIONAL CONFERENCES; MATE RIAL PROPERTIES; MEMS APPLICATIONS; MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS); POLY SIGE; POLY-SI; PROMISING APPROACH;

MICROELECTROMECHANICAL DEVICES;

EID: 46149092275     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2006.320128     Document Type: Conference Paper

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