High-performance PMOS devices on (110)/〈111'〉 substrate/channel with multiple stressors

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2006, Pages

  Wang, Howard C H ^a   Huang, Shih Hian ^a   Tsai, Ching Wei ^a   Lin, Hsien Hsin ^a   Lee, Tze Liang ^a   Chen, Shih Chang ^a   Diaz, Carlos H ^a   Liang, Mong Song ^a   Sun, Jack Y C ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL DIRECTIONS; CMOS DEVICES; MULTIPLE STRESSORS; PMOS DEVICES;

ELECTRON DEVICES;

EID: 46049090999     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2006.346960     Document Type: Conference Paper

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