Amperometric/potentiometric hydrocarbon sensors: Real world solutions for use in ultra high vacuum

Journal of Applied Electrochemistry

Volumn 38, Issue 8, 2008, Pages 1089-1096

  Kyriakou, Georgios ^a   Stevens, Amy V ^a   Davis, David J ^a   Grant, Robert B ^b   Tikhov, Mintcho S ^a   Lambert, Richard M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Lithography Subsystems   (United Kingdom)

Author keywords

Electrochemistry; Electrode; Oxygen XPS; Platinum; Sensor

Indexed keywords

CARBON; DEPOSITS; DETECTORS; ELECTRONS; HYDROCARBONS; LITHOGRAPHY; OPTICS; OXYGEN; RADIATION; RUTHENIUM; SENSORS; SOLID ELECTROLYTES; SURFACE CHEMISTRY; SURFACES; VACUUM;

(1 1 0) SURFACE; BUSINESS MEDIA; CARBON CONTAMINATION; CARBONACEOUS DEPOSITS; ELECTROCHEMICAL PROMOTION OF CATALYSIS (EPOC); EUV LITHOGRAPHY (EUVL); EXTREME ULTRA-VIOLET (EUV); GASEOUS HYDROCARBONS; HIGH VACUUM ENVIRONMENTS; HYDROCARBON SENSORS; INTERNATIONAL CONFERENCES; ION CONDUCTING; LABORATORY MEASUREMENTS; MULTILAYER MIRROR (MLM); PROCESS IMPLEMENTATION; REAL WORLD; SPRINGER (CO); TRACE AMOUNTS; ULTRA-HIGH VACUUM (UHV);

ORGANIC COMPOUNDS;

EID: 45849113623     PISSN: 0021891X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10800-008-9568-5     Document Type: Article

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