Tool-induced hotspot fixing flow for high-volume products

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7028, Issue , 2008, Pages

  Mashita, Hiromitsu ^a   Kotani, Toshiya ^a   Nakajima, Fumiharu ^a   Mukai, Hidefumi ^a   Sato, Kazuya ^a   Tanaka, Satoshi ^a   Hashimoto, Kohji ^a   Inoue, Soichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

DFM; DoE; High volume productivity; Hot spot; Multi variable optimization; OPC; Optical parameter; Optical variation

Indexed keywords

DESIGN OF EXPERIMENT (DOE); DESIGN STAGES; EXPOSURE TOOLS; HIGH VOLUME PRODUCTS; HOT SPOT DETECTION; HOT SPOTTING; IN ORDER; LAYOUT MODIFICATION; LITHOGRAPHY SIMULATIONS; MASK TECHNOLOGY; NEXT-GENERATION LITHOGRAPHY (NGL); OPTICAL (PET) (OPET); OPTICAL PARAMETERS; PATTERN FORMATIONS; PHOTO MASKING;

AEROSPACE APPLICATIONS; ARCHITECTURAL DESIGN; COMPUTER NETWORKS; DESIGN OF EXPERIMENTS; EXPOSURE METERS; INDUSTRIAL APPLICATIONS; LITHOGRAPHY; OPTICAL VARIABLES CONTROL; OPTIMIZATION; PARAMETER ESTIMATION; PHOTOMASKS; TECHNOLOGY; TOOLS;

OPTICAL DESIGN;

EID: 45549098165     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.793125     Document Type: Conference Paper

References (4)

1. S. Inoue, T. Kotani, S. Nojima, S. Tanaka, K. Hashimoto and I. Mori : Electronic Design Processes (EDP) Workshop (2003).
2. T. Kotani, H.Ichikawa, T.Urakami, S.Nojima, S.Kobayashi, Y.Oikawa, S.Tanaka, A.Ikeuchi, K.Suzuki and S. Inoue : Proc. SPIE Vol. 5130 (2003) 628
3. T. Kotani, S. Tanaka, S. Nojima, K. Hashimoto, S. Inoue and I. Mori : Proc. SPIE Vol. 5379 (2004) 128
4. T. Kotani, F. Nakajima, H. Mashita, K. Sato, S. Tanaka and S. Inoue : Proc. SPIE 2008, to be published