A new OPC method for double patterning technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6924, Issue , 2008, Pages

  Pan, Yijie ^a   Zhang, Hongbo ^b   Chen, Ye ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Ad OPC; Decomposition; Double patterning; Optical proximity correction; Re cut; Reuse; Segment move

Indexed keywords

CADMIUM; CADMIUM COMPOUNDS; COMPUTER NETWORKS; CONTROL THEORY; DECOMPOSITION; ELECTRON BEAM LITHOGRAPHY; MATHEMATICAL MODELS; MULTITASKING; PHOTOLITHOGRAPHY; RHENIUM; ROBUST CONTROL; TECHNOLOGY; TITRATION;

(ALGORITHMIC) COMPLEXITY; (E ,3E) PROCESS; CD UNIFORMITY (CDU); CONVERGENCE (MATHEMATICS); DATA VOLUMES; DEEP SUB-MICRON (DSM); DOUBLE PATTERNING; EDGE PLACEMENT ERROR (EPE); MANUFACTURABILITY; NEW MODEL; OPTICAL MICRO LITHOGRAPHY; OPTICAL PROXIMITY CORRECTION (OPC); OVERLAP CORRECTION; OVERLAY CONTROL; PATTERN CORRECTION; PRINTING PROBLEMS; RUN TIME; SPEED UPS; STITCHING TECHNOLOGY; VLSI TECHNOLOGIES;

CONVERGENCE OF NUMERICAL METHODS;

EID: 45449087528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772345     Document Type: Conference Paper

References (8)

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2. Nobuhito Toyama, et al., "Approach to Analyze Decomposition Impact for Photomask Fabrication", Proceedings of SPIE, vol. 6607, (2007).
3. J. Park, et al, "Application Challenges with Double Patterning Technology (DPT) beyond 45nm", Proc. of SPIE, Vol.6349, (2006).
4. Martin Drapeau, et al., "Double Patterning Design Split Implementation and Validation for the 32nm Node", SPIE Vol.6521,(2007)
5. George E.Bailey, et al., "Double pattern EDA solution for 32nm HP and beyond", Proceedings of SPIE, Vol.6521,(2007)
6. Chang-Moon Lim, et al., "Positive and Negative Tone Double Patterning Lithography For 50nm Flash Memory", SPIE Vol.6154, (2006).
7. Hongbo Zhang, Zheng Shi, "SOFT: smooth OPC fixing technique for ECO process", Proc. SPIE Vol. 6521, (2007).
8. Xin Wang, Mark Pilloff, Hongbo Tang and Clive Wu, "Exploiting hierarchical structure to enhance cell-based RET with localized OPC reconfiguration", SPIE Vol.5756, (2005).