The use of unified APC/FD in the control of a metal etch area

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2004, Pages 237-240

  Hyde, Joyce ^a   Doxsey, John ^b   Card, Jill ^a  

^a NeuMath Inc   (United States)

^b NATIONAL SEMICONDUCTOR CORPORATION   (United States)

Author keywords

Advanced Process Control (APC); Fault Detection (FD); Neural Networks; Process capability (C pk)

Indexed keywords

ADVANCED PROCESS CONTROL )APC); DYNAMIC NEURAL CONTROLLER (DNC); FAULT DETECTION (FD); PROCESS CAPABILITY;

COMPUTER CONTROL; ETCHING; FAILURE ANALYSIS; MAINTENANCE; NEURAL NETWORKS; PROCESS CONTROL; PROGRAM DEBUGGING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 4544348626     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Card J.P., Naimo M., and Ziminsky M., "Run-to-Run Process Control of a Plasma Etch Process with Neural Network Modeling," Quality and Reliability Engineering International 14, no. 4: 247-260, (1998).
2. Card, J. and Laurin, L., "Using Neural Networks for Intelligent Plasma Etch Process Control," Solid State Technology 45, no. 11: 33-36, (2002).
3. Cheng C.H. and Moyne J., "Intelligent Metrology and Control Systems Applied to Lithography Processes: Case Study: Lithography Overlay Run-to-Run Control", 14th AEC/APC Symposium Snowbird, UT,(2002).
4. R. Chong et al., "Analysis of a Run-to-Run Controller on a Drifting STI Etch Process by Augmentation of the Integrated Interferometric Endpoint Detection System", 14th AEC/APC Symposium Snowbird, UT,(2002).
5. Limanond S., Si J., and Tsakalis K., "Monitoring and Control of Semiconductor Manufacturing Processes," IEEE Control Systems Magazine 18, no. 6: 46-58, (1998).
6. Card J, Chan W., Eills M et. al, Dynamic neural controller: test results for LAM plasma etch applications, 13th AEC/APC Symposium Banff, Canada (2001)
7. Cao A., Card J. and Chan W., Using maintenance input data to increase the prediction accuracy of APC strategies, Micro, July, (2003)