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Volumn 566-568, Issue 1-3 PART 1, 2004, Pages 40-44

Microstructural studies of TiN coatings prepared by PVD and IBAD

Author keywords

Adhesion; Coatings; Ion bombardment; Scanning electron microscopy (SEM); X ray scattering, diffraction, and reflection

Indexed keywords

ACOUSTIC EMISSIONS; ADHESION; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; MICROHARDNESS; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THIN FILMS; X RAY ANALYSIS; X RAY SCATTERING;

EID: 4544325212     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2004.06.060     Document Type: Conference Paper
Times cited : (35)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.