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Volumn 566-568, Issue 1-3 PART 1, 2004, Pages 40-44
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Microstructural studies of TiN coatings prepared by PVD and IBAD
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Author keywords
Adhesion; Coatings; Ion bombardment; Scanning electron microscopy (SEM); X ray scattering, diffraction, and reflection
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Indexed keywords
ACOUSTIC EMISSIONS;
ADHESION;
ION BEAM ASSISTED DEPOSITION;
ION BOMBARDMENT;
MICROHARDNESS;
MICROSTRUCTURE;
PHYSICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SURFACE ROUGHNESS;
THIN FILMS;
X RAY ANALYSIS;
X RAY SCATTERING;
DIFFRACTION AND REFLECTION;
ION ENERGY;
QUARTZ CRYSTAL;
STEEL SUBSTRATES;
TITANIUM NITRIDE;
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EID: 4544325212
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/j.susc.2004.06.060 Document Type: Conference Paper |
Times cited : (35)
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References (8)
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