A novel ultra-violet assisted anisotropic etching of plastic to realize micro-gears

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 563-570

  Sadeghi Makki, Baharesh ^a   Ghafouri Fard, Mohamma Reza ^a   Mohajerzadeh, Shamsoddin ^a   Maleki, Teymor ^a   Mohammadi, S ^a   Miri, M ^a   Soleimani, Ebrahim Asl ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

DMF solvent; Etching temperature; Intensity; Micro gears; Ultra violet illumination; Vertical etching

Indexed keywords

ANISOTROPY; ETCHING; LIGHT EMITTING DIODES; METHANE; SOLVENTS; THERMAL EFFECTS; THIN FILMS; ULTRAVIOLET RADIATION;

DMF SOLVENTS; ETCHING TEMPERATURE; INTENSITY; MICRO-GEARS; ULTRA-VIOLET ILLUMINATION;

PLASTICS;

EID: 4544289593     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.015     Document Type: Conference Paper

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