Plastic micromachining assisted by ultraviolet illumination

IEEE Transactions on Electron Devices

Volumn 50, Issue 8, 2003, Pages 1813-1815

  Maleki, Teymour ^a   Mohajerzadeh, Shamsoddin ^a   Afzali Kusha, Ali ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

Anisotropic etching; Micro gear; PET; UV illumination

Indexed keywords

MASKS; PLASTICS; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; ULTRAVIOLET RADIATION;

PLASTIC MICROMACHINING;

MICROMACHINING;

EID: 0042944319     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.815129     Document Type: Article

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