Modeling and high-precision control of a ball-screw-driven stage

Precision Engineering

Volumn 28, Issue 4, 2004, Pages 483-495

  Chen, C L ^a   Jang, M J ^b   Lin, K C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b FAR EAST UNIVERSITY   (Taiwan)

Author keywords

Ball screw; Friction; Nano positioning; Sliding mode control

Indexed keywords

ACTUATORS; FRICTION; FUNCTIONS; HYSTERESIS; INDUSTRIAL APPLICATIONS; PLASTICITY; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SLIDING MODE CONTROL;

BALL-SCREWS; COULOMB DESCRIPTION; NANO-POSITIONING; STRIBECK EFFECTS;

PRECISION ENGINEERING;

EID: 4544273264     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2004.03.001     Document Type: Article

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