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Volumn 6, Issue , 2004, Pages 1-12
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Low k thin films based on rf plasma-polymerized aniline
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 4544257739
PISSN: 13672630
EISSN: None
Source Type: Journal
DOI: 10.1088/1367-2630/6/1/064 Document Type: Article |
Times cited : (37)
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References (20)
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