Perturbation method for analyzing mass sensitivity of planar multilayer acoustic sensors

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 43, Issue 5, 1996, Pages 844-851

  Wang, Zuoqing ^a,b   David, J ^a,b   Checke, N ^a,b  

^a Gina Cody School of Engineering and Computer Science   (Canada)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE TRANSMISSION; DIFFUSION COATINGS; ELASTICITY; FILMS; MULTILAYERS; PERTURBATION TECHNIQUES; SENSITIVITY ANALYSIS; SUBSTRATES;

BULK ACOUSTIC WAVE (BAW) RESONATOR; FLEXURAL PLATE WAVE (FPW) ACOUSTIC GRAVIMETRIC SENSORS; LOVE MODES; MASS SENSITIVITY FORMULAS; PLANAR MULTILAYER ACOUSTIC SENSORS; RAYLEIGH HYPOTHESIS; RAYLEIGH MODES; SAGITTAL MODES; SHEAR HORIZONTAL MODES; SURFACE ACOUSTIC WAVE (SAW) RESONATOR;

SENSORS;

EID: 0030241115     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.535485     Document Type: Article

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