SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 2, 2007, Pages 87-93

Damage clustering and damage-size distributions after megasonic cleaning

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICES; SIZE DISTRIBUTION;

DAMAGE EVENTS; DAMAGED AREA; DAMAGING EVENTS; DEFECT CLUSTER; GATE STACKS; MEGASONIC CLEANING; RANDOM DISTRIBUTION;

CLEANING;

EID: 45249121998 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2779366 Document Type: Conference Paper

Times cited : (14)

References (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.