Effects of oxygen content on the structural and sensing properties of Y2O3 sensing membrane for pH-ISFET application

2007 International Semiconductor Device Research Symposium, ISDRS

Volumn , Issue , 2007, Pages

  Pan, Tung Ming ^a   Liao, Kao Ming ^a   Yen, Li Chen ^a   Hsieh, Yu Yi ^a   Chen, Yue Zhang ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 44949260200     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISDRS.2007.4422250     Document Type: Conference Paper

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4. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Eden Prairie, MN, 1992).
5. C. D. Fung, P. W. Cheung, and W. H. Ko, "A generalized theory of an electrolyte-insulator-semiconductor field-effect transistor," IEEE Trans. Electron Devices, vol. 33, no. l,pp. 8-18, 1986.