Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength

Optics Letters

Volumn 33, Issue 9, 2008, Pages 965-967

  Kjornrattanawanich, Benjawan ^a   Windt, David L ^b   Seely, John F ^c  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b Reflective X ray Optics LLC   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYERS; REFLECTION; REFLECTIVE COATINGS; SILICON NITRIDE;

AS INTERFACES; EXTREME ULTRAVIOLET; INCIDENT ANGLES; NARROW BANDS; NORMAL INCIDENCE; REFLECTANCE DATA; SPECTRAL BANDWIDTH;

SILICON;

EID: 44949207273     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.33.000965     Document Type: Article

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