High sensitivity ultrasonic sensor for hydrophone applications, using an epitaxial Pb(Zr,Ti)O3 film grown on SrRuO3/Pt/γ-Al2O3/Si

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 278-282

  Ito, M ^a   Okada, N ^b   Takabe, M ^a   Otonari, M ^a   Akai, D ^a   Sawada, K ^a   Ishida, M ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b HONDA ELECTRONICS CO LTD   (Japan)

Author keywords

Al2O3; Epitaxial; Hydrophone; PZT; Si integrated; Ultrasonic sensor

Indexed keywords

ELECTROACOUSTIC TRANSDUCERS; LEAD; LEAD ALLOYS; SENSORS; ULTRASONIC APPLICATIONS; ULTRASONIC SENSORS; ULTRASONICS; ZIRCONIUM;

HIGH SENSITIVITY (HS); LEAD ZIRCONATE TITANATE (PZTN);

DETECTORS;

EID: 44849118816     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.01.014     Document Type: Article

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