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Volumn 15, Issue 10, 2007, Pages 817-823
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Invited paper: Blazed GxLP™ light modulators for laser projectors
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Author keywords
Blazed; CLV; GxL; Laser projector; MEMS
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Indexed keywords
CHEMICAL MECHANICAL POLISHING;
CHEMICAL POLISHING;
COMPOSITE MICROMECHANICS;
ELECTROMAGNETIC WAVES;
LASERS;
LIGHT;
LIGHT MODULATION;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MODULATORS;
BLAZED;
CLV;
CONTRAST RATIOS;
FABRICATION PROCESSES;
GXL;
HIGH RELIABILITIES;
INCIDENT LASER BEAMS;
LASER PROJECTOR;
LASER PROJECTORS;
OPTIMIZING;
ORDER CONTROLS;
SACRIFICIAL LAYERS;
STRUCTURAL SIMULATIONS;
ULTRA HIGHS;
LIGHT MODULATORS;
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EID: 44849117778
PISSN: 10710922
EISSN: None
Source Type: Journal
DOI: 10.1889/1.2798821 Document Type: Article |
Times cited : (10)
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References (11)
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