Nanometer-order control of MEMS ribbons for blazed grating light valves

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 842-845

  Saruta, Kunihiko ^a   Kasai, Hiroto ^a   Nishida, Masato ^a   Yamaguchi, Masanari ^a   Ito, Yasuyuki ^a   Yamashita, Keitaro ^a   Taguchi, Ayumu ^a   Oniki, Kazunao ^a   Tamada, Hitoshi ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LIGHT MODULATORS; NANOTECHNOLOGY; OPTIMIZATION; SCANNING; VALVES (MECHANICAL);

LIGHT VALVES; OPTICAL EFFICIENCY; SECOND DIMENSION;

MICROELECTROMECHANICAL DEVICES;

EID: 33750104206     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. D. Bloom, "The Grating Light Valve: Revolutionizing Display Technology," Projection Displays III Symposium, SPIE Proceedings Volume 3013, San Jose, February 1997.
2. David T. Amm et al., USP6639722.
3. Y. Ito et al., "High-performance blazed GxL™ device for large-area laser projector", SPIE Photonic West 2006, San Jose, January 2006. (To be published)
4. H. Tamada et al., "High contrast and efficient blazed grating light valve for full-HD 5000 lumen laser projector", ICCE2006, January 2006. (To be published)
5. S. Kubota, Optics & Photonics News, 50, September 2002.
6. N. Eguchi et al., "A 1,000-lumen Grating Light Valve laser projector" IDW02, Hiroshima, Japan, Dec.4-6, 2002.
7. T. Taniguchi et al., "A behavior of Xenon difluoride etching on poly-Silicon sacrificial layer for fabrication of MEMS device", Ext. abstract of 2002 SSDM, pp.686-687, 2002.