High-performance blazed GxL™ device for large-area laser projector

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Ito, Yasuyuki ^a   Saruta, Kunihiko ^a   Kasai, Hiroto ^a   Nishida, Masato ^a   Yamaguchi, Masanari ^a   Yamashita, Keitaro ^a   Taguchi, Ayumu ^a   Oniki, Kazunao ^a   Tamada, Hitoshi ^a  

^a SONY CORPORATION   (Japan)

Author keywords

Blaze; GLV; GxL; Laser Projector; MEMS

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEGRADATION; LASER BEAM EFFECTS; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES;

BLAZE; GLV; GXL; LASER PROJECTOR;

OPTICAL DEVICES;

EID: 33646205078     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.645463     Document Type: Conference Paper

References (11)

1. O. Solgaard, F. S. A. Sandejas, D. M. Bloom, "Defornable Grating Optical Modulator", Optics Letters, Volume 17, Issue 9, 688, May 1992.
2. D. T. Amm and R. W. Corrigan, Projection Displays V Symposium, "Optical Performance of the Grating Light Valve™ Technology", SPIE Proceedings Volume El 3634-10, San Jose CA, Feb. 1999.
3. R. W. Corrigan, D. T. Amm, P.A. Alioshin, B. Staker, D. A. LeHoty, K. Gross, B. R. Lang, "Calibration of a Scanned Linear Grating Light Valve™ Projection System", SlD Symposium, San Jose CA, May 1999.
4. S. Kubota, Optics & Photonics News, 50, September 2002.
5. Naoya Eguchi and Shigeo Kubota, "A 1,000-lumen Grating Light Valve laser projector", IDW02, Hiroshima, Japan, Dec.4-6 2002
6. David Amm et al., USP6829092.
7. K. Saruta et al., "Nanometer-ordered Control of MEMS Ribbons for Blazed Grating Light Valves", to be published at MEMS2006, Jan. 2006
8. T. Taniguchi et al., "A Behavior of Xenon Difluoride Etching on Poly-Silicon Sacrificial Layer for Fabrication of MEMS Device", Ext. Abst. of 2002 SSDM, 686, 2002.
9. S. Vaidya, T. T. Sheng, A. K. Sinha, "Linewidth dependence of electromigration in evaporated Al-0.5%Cu", Appl. Phys. Lett. 36, 464, 1980.
10. F. M. d'Heurle, Metal Trans. 2, 683, 1971.
11. H. Tamada et al., "High Contrast and Efficient Blazed Grating Light Valve for Full-HD 5,000 Lumen Laser Projectors", to be published at ICCE2006, Jan. 2006