Internal stresses and stability of the tetragonal phase in zirconia thin layers deposited by OMCVD

Applied Surface Science

Volumn 254, Issue 18, 2008, Pages 5807-5813

  Benali, B ^a   Huntz, A M ^a   Andrieux, M ^a   Ignat, M ^b   Poissonnet, S ^c  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b UNIV GRENOBLE ALPES   (France)

^c JANNUS Saclay Laboratory   (France)

Author keywords

Annealing; Phase transformation; Tensile test; Tetragonal and monoclinic phases; Zirconia thin films

Indexed keywords

ANNEALING; PHASE TRANSITIONS; TENSILE TESTING; ZIRCONIA;

TETRAGONAL AND MONOCLINIC PHASES; ZIRCONIA THIN FILMS;

THIN FILMS;

EID: 44549086236     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.03.147     Document Type: Article

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