Stress driven phase transformation in ZrO 2 film

Applied Surface Science

Volumn 253, Issue 3, 2006, Pages 1222-1226

  Benali, B ^a   Ghysel, M Herbst ^a   Gallet, I ^a   Huntz, A M ^a   Andrieux, M ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

Bending test; Mechanical properties; Phase transformation; Tetragonal and monoclinic phases; Zirconia thin films

Indexed keywords

DEPOSITION; MECHANICAL PROPERTIES; PHASE TRANSITIONS; STRESS ANALYSIS; SUBSTRATES; ZIRCONIUM COMPOUNDS;

BENDING TEST; TETRAGONAL STRUCTURE; TETRAGONAL/MONOCLINIC PHASES; ZIRCONIA THIN LAYERS;

THIN FILMS;

EID: 33750684634     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.01.060     Document Type: Article

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