Miniaturization of thermoelectric hydrogen sensor prepared on glass substrate with low-temperature crystallized SiGe film

Sensors and Actuators, B: Chemical

Volumn 103, Issue 1-2, 2004, Pages 252-259

  Qiu, Fabin ^a,b   Shin, Woosuck ^a   Matsumiya, Masahiko ^a   Izu, Noriya ^a   Matsubara, Ichiro ^a   Murayama, Norimitsu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JILIN UNIVERSITY   (China)

Author keywords

Glass substrate; Hydrogen sensor; Polycrystalline SiGe film; Thermoelectric effect

Indexed keywords

CATALYSIS; CATALYSTS; CHEMICAL SENSORS; CRYSTALLIZATION; GLASS; SCANNING ELECTRON MICROSCOPY; SINTERING; THERMOELECTRICITY; X RAY DIFFRACTION ANALYSIS;

CONTACT ELECTRODES; GLASS SUBSTRATES; HIGH PURITY GASES; SCHEMATIC STRUCTURES;

SEMICONDUCTING FILMS;

EID: 4444347789     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.04.057     Document Type: Conference Paper

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