The corrosion performance of very thin carbon overcoat layers in magnetic media

IEEE Transactions on Magnetics

Volumn 40, Issue 4 II, 2004, Pages 3195-3197

  Kuan, E T ^a   Park, D W ^a   Melo, J ^a   Spaulding, D ^a   Liu, J J ^a   Kim, K K ^a  

^a MAXTOR CORPORATION   (United States)

Author keywords

Carbon overcoat; Corrosion; Dual layer carbon; Magnetic media; Plasma enhanced chemical vapor deposition (PECVD)

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON; CORROSION; ELLIPSOMETRY; LIGHT SCATTERING; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

CARBON OVERCOAT; DUAL-LAYER CARBON; FRACTURE RESISTANCE; MAGNETIC MEDIA;

MAGNETIC THIN FILMS;

EID: 4444317960     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.829844     Document Type: Article

References (8)

1. N.-H. Cho, K. M. Krishnan, D. K. Veirs, M. D. Rubin, C. B. Hopper, and B. Bhushan, "Chemical structure and physical properties of diamond-like amorphous carbon films prepared by magnetron sputtering," J. Mater. Res., vol. 5, pp. 2543-2554, 1990.
2. K. J. Schulz and K. V. Viswanathan, "A comparison of film structure and surface chemistry of carbon and oxide disk overcoats," IEEE Trans. Magn., vol. 27, pp. 5166-5168, 1991.
3. S. Agarwal and E. Li, "Structure and tribological performance of carbon overlayer films," IEEE Trans. Magn., vol. 29, pp. 264-269, 1993.
4. C. C. Wang, R. W. J. Chia, J. K. Lee, and W. T. Tang, "Study of substrate bias effect on corrosion susceptibility of thin film magnetic disks by accelerated chemical tests," J. Vac. Sci. Technol. A, vol. 16, pp. 1745-1749, 1998.
5. S. Pirzada, J. J. Liu, F. Li, B. Demczyk, and D. Spaulding, "Effect of precursor on overcoat properties in ion bean carbon process," J. Appl. Phys., vol. 91, pp. 7562-7564, 2002.
6. S. A. Pirzada, J. J. Liu, Z. F. Li, J. Liu, D. Park, and C.-Y. Chen, "Functionalized ion-beam carbon for magnetic disks," IEEE Trans. Magn., vol. 38, pp. 2117-2119, 2002.
7. Dionex Corp., "Determination of transition metals at PPT levels in high-purity water and SC2 (D-clean) baths," Dionex, Application Note 131, 2000.
8. D. L. Klein and G. H. Vurens, "Measurements of thin film disks by surface reflectance analysis," in Proc. SPIE, vol. 3619, 1999, pp. 18-26.