Measurements of thin film disks by surface reflectance analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 18-26

  Klein, David L ^a   Vurens, Gerard H ^a  

^a HDI Instrumentation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; IMAGE ANALYSIS; LIGHT REFLECTION; MAGNETIC FILM STORAGE; OPTICAL DESIGN; SURFACE MEASUREMENT; THICKNESS MEASUREMENT; TRIBOLOGY;

SURFACE REFLECTANCE ANALYSIS (SRA);

MAGNETIC DISK STORAGE;

EID: 0032659799     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)