A new way to integrate solid state nanopores for translocation experiments

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1311-1313

  Huisman, E M ^a   Biance, A L ^a,b,c   Madouri, A ^a   Patriarche, G ^a   Bourhis, E ^a   Oukhaled, G ^b   Auvray, L ^b   Gierak, J ^a  

^a UNIV PARIS SUD   (France)

^b UNIVERSITÉ D EVRY VAL D ESSONNE   (France)

^c National Centre of Scientific Research   (France)

Author keywords

Bioapplications; FIB; HF etching; Micro nanofluidic; Nanopores; Pyrex

Indexed keywords

ETCHING; MICROFLUIDICS; MICROMETERS; SOLID STATE DEVICES;

HF ETCHING; PYREX WAFERS; SOLID STATE NANOPORES;

NANOPORES;

EID: 44349182737     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.106     Document Type: Article

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