Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1147-1151

  Chen, Yifang ^a   Zhou, Yun ^b   Pan, Genhua ^b   Huq, Ejaz ^a,b,c,d   Lu, Bing Rui ^c   Xie, Shen Qi ^c   Wan, Jing ^c   Shu, Zhen ^c   Qu, Xin Ping ^c   Liu, Ran ^c   Banu, S ^d   Birtwell, S ^d   Jiang, Liudi ^d  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b UNIVERSITY OF PLYMOUTH   (United Kingdom)

^c ASIC and System   (China)

^d UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Hot embossing; Meta materials; Photonic structures; Reactive ion etch; SiC templates

Indexed keywords

AMORPHOUS FILMS; ELECTRON BEAM LITHOGRAPHY; HOT PRESSING; MAGNETIC MATERIALS; NANOTECHNOLOGY; PHOTONIC CRYSTALS; REACTIVE ION ETCHING;

HOT EMBOSSING; META MATERIALS; PHOTONIC STRUCTURES; SIC TEMPLATES;

SILICON CARBIDE;

EID: 44349170603     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.002     Document Type: Article

References (7)

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