Micro four-point probe with metal tip

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 283-287

  Shin, Heungjoo ^a   Hesketh, Peter J ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTROCHEMICAL ELECTRODES; ETCHING; MASKS; MICROSTRUCTURE; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; WEAR OF MATERIALS;

METAL CANTILEVERS; METAL TIPS;

SILICA;

EID: 1942424101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-42443     Document Type: Conference Paper

References (12)

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