A novel microfabricated formaldehyde gas sensor with NiO thin film

Proceedings of the ISA/IEEE 2005 Sensors for Industry Conference, Sicon'05

Volumn , Issue , 2005, Pages 1-5

  Lee, Chia Yen ^a   Chiang, Che Ming ^b   Chou, Po Cheng ^c   Fu, Lung Ming ^d   Lin, Che Hsin ^e  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c SHU TE UNIVERSITY   (Taiwan)

^d NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^e NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FORMALDEHYDE; MICROSTRUCTURE; NICKEL COMPOUNDS; SILICA; THIN FILMS;

FORMALDEHYDE GAS SENSORS; FORMALDEHYDE SENSING LAYERS; HEATING FUNCTIONS;

CHEMICAL SENSORS;

EID: 36048972355     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SICON.2005.257859     Document Type: Conference Paper

References (22)

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12. nd Ed, chap. 5.8, WHO Regional Office for Europe, Copenhagen, Denmark, 2001.
13. J.A. Dirksen, K. Duval, T.A. Ring, "NiO thin-film formaldehyde gas sensor", Sensors and Actuators B, vol. 80, pp. 106, 2001.
14. Y. Mine, N. Melander, D. Richter, D.G. Lancaster, K.P. Petrov, R.F. Curl, F.K. Tittel, "Detection of formaldehyde using mid-infrared difference-frequency generation", Applied Physics B, vol. 65, pp. 771, 1997.
15. S. Friedfeld, M. Fraser, "Field intercomparison of a novel optical sensor for formaldehyde quantification", Geophysical Research Letters, vol. 27 (14), pp. 2093, 2000.
16. 2 gas sensor", Thin Solid Films, vol. 418, pp. 9, 2002.
17. M. Matsumiya, F. Qiu, W. Shin, N. Izu, N. Murayama, S. Kanzaki, "Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor", Thin Solid Films, vol. 419, pp. 213, 2002.
18. R.E. Cavicchi, J.S. Suehle, K.G. Kreider, M. Gaitan, P. Chaparala, "Fast temperature programmed sensing for micro-hotplate gas sensors", IEEE Electron Device Letters, vol. 16 (6), pp. 286, 1995.
19. C.Y. Lee, G.B. Lee, H.H. Liu, F.C. Huang, "MEMS-based temperature control systems for PCR applications", The International Journal of Non-linear Sciences and Numerical Simulations, vol. 3 (4), pp.177 , 2002.
20. P. Kofstad, Non-stoichiometry, Diffusion, and Electrical Conductivity in Binary Metal Oxide, Wiley, New York, 1972, pp. 252.
21. x films", Surface and Coating Technology, vol. 155, pp. 231, 2002.
22. E. Fujii, A. Tomozawa, H. Torii, R. Takayama, Japanese Journal of Applied Physics, vol. 35, pp. L328, 1996.