Transparent conductive film for top-emission organic light-emitting devices by low damage facing target sputtering

Thin Solid Films

Volumn 516, Issue 17, 2008, Pages 5911-5915

  Onai, Yusuke ^a   Uchida, Takayuki ^a   Kasahara, Yoshihiro ^a   Ichikawa, Keisuke ^a   Hoshi, Yoichi ^a  

^a TOKYO POLYTECHNIC UNIVERSITY   (Japan)

Author keywords

Facing target sputtering; Indium tin oxide; Low damage; Magnetron sputtering; Organic light emitting device; Top emission; Two step sputtering

Indexed keywords

ELECTRODES; INDIUM COMPOUNDS; ION BOMBARDMENT; LIGHT EMISSION; MAGNETRON SPUTTERING; ORGANIC LIGHT EMITTING DIODES (OLED); SPUTTER DEPOSITION;

ELECTRODE FILMS; FACING TARGET SPUTTERING; INDIUM TIN OXIDE; TWO-STEP SPUTTERING;

CONDUCTIVE FILMS;

EID: 44249085190     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.043     Document Type: Article

References (7)

1. Gu G., Bulovic V., Burrows P.E., Forrest S.R., and Thompson M.E. Appl. Phys. Lett. 68 (1996) 2606
2. Kim H.-K., Lee K.-S., Keum M.-J., and Kim K.-H. Appl. Phys. Lett. 86 (2005) 183503
3. Keum M.-J., and Kim K.-H. Jpn. J. Appl. Phys. 45 (2006) 8462
4. Uchida T., Kaneta S., Ichihara M., Ohtsuka M., Otomo T., and Marx D.R. Jpn. J. Appl. Phys. 48 (2005) 282
5. Kim H.-K., Lee K.-S., Keum M.-J., and Kim K.-H. Electrochem Solid-State Lett. 8-12 (2005) 103
6. Kim H.-K., Lee K.-S., and Keum M.-J. Appl. Phys. Lett. 88 (2006) 012103
7. Hoshi Y., Kato H.-o., and Funatsu K. Thin Solid Films 445 (2003) 245