Design and fabrication of a Si micromechanical capacitive array for DNA sensing

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1359-1361

  Tsouti, V ^a,b   Chatzandroulis, S ^a   Goustouridis, D ^a   Normand, P ^a   Tsoukalas, D ^b  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

Author keywords

Biosensor; Capacitive detection; Finite element analysis; Membrane array

Indexed keywords

BIOSENSORS; CELL MEMBRANES; DNA; FINITE ELEMENT METHOD; OPTIMIZATION; SILICON COMPOUNDS;

CAPACITIVE DETECTION; MEMBRANE ARRAY;

MICROARRAYS;

EID: 44149127517     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.075     Document Type: Article

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