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Volumn 85, Issue 5-6, 2008, Pages 910-913

Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint

Author keywords

Free standing; Near infrared; SU 8 resist; Subwavelength gratings; UV curing imprint

Indexed keywords

CURING; ELECTRON BEAM LITHOGRAPHY; INFRARED RADIATION; ULTRAVIOLET RADIATION;

EID: 44149116496     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.060     Document Type: Article
Times cited : (19)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.