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Volumn 85, Issue 5-6, 2008, Pages 910-913
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Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint
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Author keywords
Free standing; Near infrared; SU 8 resist; Subwavelength gratings; UV curing imprint
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Indexed keywords
CURING;
ELECTRON BEAM LITHOGRAPHY;
INFRARED RADIATION;
ULTRAVIOLET RADIATION;
SUBWAVELENGTH GRATINGS;
UV CURING IMPRINTS;
DIFFRACTION GRATINGS;
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EID: 44149116496
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2007.12.060 Document Type: Article |
Times cited : (19)
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References (6)
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