Intrinsically conductive polymer thin film piezoresistors

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 969-971

  Lillemose, M ^a   Spieser, M ^a   Christiansen, N O ^a   Christensen, A ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Conductive polymer; Microfabrication; Piezoresistor

Indexed keywords

ELECTRIC RESISTANCE; MICROFABRICATION; POLYANILINE; SENSITIVITY ANALYSIS; STRAIN MEASUREMENT;

FOUR-POINT MEASUREMENT METHOD; PIEZORESISTORS; POLYANILINE THIN FILMS;

THIN FILMS;

EID: 44149102220     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.020     Document Type: Article

References (9)

1. Thaysen J., Yalcinkaya A.D., Vettiger P., and Menon A. Journal of Physics D: Applied Physics 35 (2002) 2698
2. Gammelgaard L., Rassmusen P.A., Calleja M., Vettiger P., and Boisen A. Applied Physics Letters 88 (2006) 113508
3. Shui X., and Chung D.D.L. Smart Materials and Structures 5 (1996) 243
4. Mateiu R., Lillemose M., Hansen T.S., Boisen A., and Geschke O. Microelectronic Engineering 84 (2007) 1270
5. Richter J., Hansen O., Nylandsted Larsen A., Lundsgaard Hansen J., Eriksen G.F., and Thomsen E.V. Sensors and Actuators A 123-124C (2005) 388
6. Rimbu G.A., Stamatin I., Jackson C.L., and Scott K. Journal of Optoelectronics and Advanced Materials 8 (2006) 670
7. Private communications with Panipol Oy.
8. McCall R.P., Scherr E.M., MacDiarmid A.G., and Epstein A.J. Physical Review B 50 (1994) 5094
9. Wang Z.H., Scherr E.M., MacDiarmid A.G., and Epstein A.J. Physical Review B 45 (1992) 4190