Improved glass-PDMS-glass device technology for accurate measurements of electro-osmotic mobilities

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1334-1336

  Plecis, Adrien ^a   Chen, Yong ^b  

^a CNRS   (France)

^b ECOLE NORMALE SUPÉRIEURE   (France)

Author keywords

Glass; Microfluidics; PDMS; Reactive ion etch

Indexed keywords

CHARACTERIZATION; ELECTROOSMOSIS; GLASS BONDING; REACTIVE ION ETCHING; SURFACE ROUGHNESS; WSI CIRCUITS;

ELECTROKINETIC CHARACTERIZATION; ELECTROOSMOTIC MOBILITIES; MICROFLUIDIC CHANNELS; SODA-LIME GLASS;

MICROFLUIDICS;

EID: 44149083324     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.097     Document Type: Article

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