Study on the doping effect of Li-doped ZnO film

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5586-5589

  Jeong, S H ^a   Park, B N ^a   Lee, S B ^a   Boo, J H ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Li doped ZnO films; RF magnetron sputtering; Structural and electrical properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; ZINC OXIDE;

DOPING EFFECTS; FILM DEPOSITION; PIEZOELECTRIC APPLICATIONS; RF MAGNETRON SPUTTERING;

THIN FILMS;

EID: 43949088791     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.075     Document Type: Article

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