Ion beam analysis of epitaxial (Mg, Cd)xZn1-xO and ZnO:(Li, Al, Ga, Sb) thin films grown on c -plane sapphire

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 891-896

  Spemann, D ^a   Kaidashev, E M ^a   Lorenz, M ^a   Vogt, J ^a   Butz, T ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Crystalline quality; Elemental composition; Thin films; Zinc oxide

Indexed keywords

ALLOYING; DEGRADATION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; EPITAXIAL GROWTH; ION BEAMS; PHONONS; PULSED LASER DEPOSITION; X RAYS; ZINC OXIDE;

CRYSTALLINE QUALITY; ELEMENTAL COMPOSITION; OPTICAL PHONON MODES;

THIN FILMS;

EID: 2342565027     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.183     Document Type: Conference Paper

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