Properties of ZnO:In film prepared by sputtering of facing ZnO:In and Zn targets

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1213-1217

  Tominaga, K ^a   Umezu, N ^a   Mori, I ^a   Ushiro, T ^a   Moriga, T ^a   Nakabayashi, I ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644254571     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581261     Document Type: Article

References (9)

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