Exploration of waveguide fabrication from thermally evaporated Ge-Sb-S glass films

Optical Materials

Volumn 30, Issue 10, 2008, Pages 1560-1566

  Hu, Juejun ^a   Tarasov, Vladimir ^a   Carlie, Nathan ^b   Petit, Laeticia ^b   Agarwal, Anu ^a   Richardson, Kathleen ^b   Kimerling, Lionel ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b CLEMSON UNIVERSITY   (United States)

Author keywords

42.70.C; 42.82.E; 52.75.R; 78.66.J; Chalcogenide films; Lift off; Plasma etching; Raman spectroscopy; Waveguide fabrication; Waveguide loss

Indexed keywords

CHALCOGENIDES; FILM PREPARATION; OPTICAL GLASS; OPTICAL LOSSES; PHOTONICS; PLASMA ETCHING; RAMAN SPECTROSCOPY; THERMAL EVAPORATION;

CHALCOGENIDE FILMS; CHANNEL WAVEGUIDES; GLASS FILMS; WAVEGUIDE FABRICATION; WAVEGUIDE LOSS;

OPTICAL WAVEGUIDES;

EID: 43449112352     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2007.10.002     Document Type: Article

References (25)

1. J. Sanghera L. Shaw L. Busse V. Nguyen P. Pureza B. Cole B. Harbison I. Aggarwal R. Mossadegh F. Kung D. Talley D. Roselle R. Miklos Fiber Integr. Opt. 19 2000 251
2. L. Busse J. Moon J. Sanghera I. Aggarwal Laser Focus World 32 1996 143
3. A. Ganjoo H. Jain J. Ryan R. Song R. Chanda J. Irudyraj Y. Ding C. Pantano Proc. SPIE 5593 2004 637
4. O. Efimov L. Glebov K. Richardson E. Van Stryland T. Cardinal S. Park M. Couzi J. Bruneel Opt. Mater. 17 2001 379
5. J. Viens C. Meneghini A. Villeneuve T. Galstian E. Knystautas M. Duguay K. Richardson T. Cardinal J. Lightwave Technol. 17 1999 1184
6. Y. Ruan W. Li R. Jarvis N. Madsen A. Rode B. Luther-Davies Opt. Express 12 2004 5140
7. J. Frantz L. Shaw J. Sanghera I. Aggarwal Opt. Express 14 2004 1797
8. A. Mairaj C. Riziotis A. Chardon P. Smith D. Shepherd D. Hewak Appl. Phys. Lett. 81 2002 3708
9. N. Ponnampalam R. DeCorby H. Nguyen P. Dwivedi C. Haugen J. McMullin S. Kasap Opt. Express 12 2004 6270
10. L. Zou B. Chen L. Chen Y. Yuan M. Hamanaka M. Iso Appl. Phys. Lett. 88 2006 153510
11. J. Hu V. Tarasov N. Carlie L. Petit A. Agarwal K. Richardson L. Kimerling Opt. Express 15 2007 2307
12. W. Li Y. Ruan B. Luther-Davies A. Rode R. Boswell J. Vac. Sci. Technol. A 23 2005 1626
13. R. Vahalova L. Tichy M. Vlcek H. Ticha Phys. Status Solidi A 181 2000 199
14. L. Petit N. Carlie F. Adamietz M. Couzi V. Rodriguez K.C. Richardson Mater. Chem. Phys. 97 2006 64
15. T. Asami K. Matsuishi S. Onari T. Arai J. Non-Cryst. Solids 211 1997 89
16. N. Carlie, J. Hu, L. Petit, A. Agarwal, L. Kimerling, A. Rode, B. Luther-Davies, K. Richardson, in preparation.
17. O. Joubert P. Paniez M. Pons J. Pelletier J. Appl. Phys. 70 1991 977
18. .C. Huang D. Hewak J. Badding Opt. Express 12 2004 250
19. Q. Mei J. Saienga J. Schrooten B. Meyer S. Martin J. Non-Cryst. Solids 324 2003 264
20. C. Julien S. Barnier M. Massot N. Chbani X. Cai A. Loireau-Lozac’h M. Guittard Mat. Sci. Eng. B 22 1994 191
21. B. Frumarova P. Nemec M. Frumar J. Oswald M. Vleck J. Non-Cryst. Solids 256–257 1999 266
22. P. Boolchand J. Grothaus M. Tenhover M. Hazle R. Grasselli Phys. Rev. B 33 1996 5421
23. S. Campbell The Science and Engineering of Microelectronic Fabrication 1996 Oxford University Press
24. C. Xu W. Huang M. Stern S. Chaudhuri IEE Proc. Optoelectron. 141 1994 281
25. J. Hu V. Tarasov N. Carlie L. Petit N. Feng A. Agarwal K. Richardson L. Kimerling Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides Opt. Express 15 2007 11798