Transparent conducting amorphous Zn-Sn-O films deposited by simultaneous dc sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1705-1710

  Moriga, Toshihiro ^a   Hayashi, Yukako ^a   Kondo, Kumiko ^a   Nishimura, Yusuke ^a   Murai, Kei Ichiro ^a   Nakabayashi, Ichiro ^a   Fukumoto, Hidenori ^a   Tominaga, Kikuo ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHATIZATION; DC MAGNETRON SPUTTERING; GLASS SUBSTRATES; HALL MOBILITY;

AMORPHOUS MATERIALS; APPROXIMATION THEORY; CARRIER MOBILITY; COMPOSITION; CONDUCTIVE MATERIALS; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC CONDUCTIVITY; GLASS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; TIN COMPOUNDS; ZINC COMPOUNDS;

THIN FILMS;

EID: 4344714100     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1765658     Document Type: Conference Paper

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