Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 327-331

  Cho, Younghak ^a   Kuki, Tony ^b   Fukuta, Yamato ^a   Fujita, Hiroyuki ^a   Kim, Beomjoon ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b Innotech Corp   (Japan)

Author keywords

KOH etching; Micro probe card; Shadow mask; Sharp knife edge

Indexed keywords

ANISOTROPY; COATINGS; DEPOSITION; FABRICATION; GOLD COMPOUNDS; HARDNESS; INTEGRATED CIRCUITS; MICROMACHINING; OXIDATION; PROBES; SILICON WAFERS; SINGLE CRYSTALS;

KOH ETCHING; MICRO PROBE CARD; SHADOW MASK; SHARP KNIFE EDGE;

CANTILEVER BEAMS;

EID: 4344698528     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.021     Document Type: Article

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