A monolithic fully-differential CMOS gas sensor microsystem for microhotplate temperatures UP to 450°C

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 2004, Pages

  Barrettino, D ^a   Graf, M ^a   Kirstein, K ^a   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTRIC POWER SYSTEMS; MICROMACHINING; MICROPROCESSOR CHIPS; PLATINUM; POLYSILICON; RESISTORS; SEMICONDUCTING TIN COMPOUNDS; TEMPERATURE CONTROL; TRANSISTORS;

DIFFERENTIAL DIFFERENCE AMPLIFIERS (DDA); LOW-NOISE AMPLIFIERS (LNA); MICROHOTPLATES; TEMPERATURE SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 4344693106     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. S. Semancik, R. E. Cavicchi, M. C. Wheeler, J. E. Tiffany, G. E. Poirier, R. M. Walton, J. S. Suehle, B. Panchapakesan and D. L. DeVoe, "Microhotplate platforms for chemical sensor research", Sensors and Actuators B 77, pp. 579-591, 2001.
2. V. Demarne and A. Grisel, "An integrated low-power thin-film CO gas sensor on silicon", Sensors and Actuators, 13, pp. 301-313, 1988.
3. D. Briand, A. Krauss, B. van der Schoot, U. Weimar, N. Bârsan, W. Göpel and N.F.de Rooij, "Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors", Sensors and Actuators, B 68, pp. 223-233, 2000.
4. D. Barrettino, M. Graf, M. Zimmermann, A. Hierlemann, H. Baltes, S. Hahn, N. Bârsan and U. Weimar, "A smart single-chip micro-hotplate-based chemical sensor system in CMOS-technology", Proceedings of the IEEE International Symposium on Circuits and Systems, Vol. 2, pp. 157-160, 2002.
5. D. Barrettino, M. Graf, M. Zimmermann, C. Hagleitner, A. Hierlemann, and H. Baltes, "A micro-hotplate-based monolithic CMOS gas sensor array", Proceedings of the IEEE International Symposium on Circuits and Systems, Vol. 4, pp. 852-855, 2003.
6. M. Y. Afridi, J. S. Suehle, M. E. Zaghloul, D. W. Berning, A. R. Hefner, S. Semancik and R. E. Cavicchi, "A Monolithic Implementation of Interface Circuitry for CMOS Compatible Gas-Sensor System", Proceedings of the IEEE International Symposium on Circuits and Systems, Vol. 2, pp. 732-735, 2002.
7. Y. Mo, Y. Okawa, K. Inoue and K. Natukawa, "Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array", Sensors and Actuators, A 100, pp. 94-101, 2002.
8. C. Hung, M. Ismail, K. Halonen and V. Porra, "Low-Voltage Rail-to-Rail CMOS Differential Difference Amplifier", Proceedings of the IEEE International Symposium on Circuits and Systems, pp. 145-148, 1997.
9. J. J. F. Rijns, "CMOS Low-Distortion High-Frequency Variable-Gain Amplifier", IEEE Journal of Solid-State Circuits, pp. 1029-1034, 1996.
10. R. Hogervost, J.P. Tero, G.H. Eschauzier and J.H. Huijsing, "A Compact Power-Efficient 3V CMOS Rail-to-Rail Input/Output Operational Amplifier for VLSI Cell Libraries", IEEE Journal of Solid-State Circuits, pp. 1505-1513, 1994.