Luminescence center transformation in wet and dry SiO2

Radiation Measurements

Volumn 38, Issue 4-6, 2004, Pages 649-653

  Fitting, H J ^a   Ziems, T ^a   Von Czarnowski, A ^a   Schmidt, B ^b  

^a UNIVERSITY OF ROSTOCK   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Cathodoluminescence; Center transformation; Irradiation dose; Precursors

Indexed keywords

ANNEALING; ELECTRIC CURRENTS; ELECTRIC EXCITATION; ELECTRON BEAMS; HYDROGEN; IRRADIATION; MICROELECTRONICS; OXIDES; SILICA; THICKNESS MEASUREMENT; ULTRAVIOLET RADIATION; VELOCITY;

CENTER TRANSFORMATION; IRRADIATION DOSE; OXYGEN DEFICIENT CENTER (ODC); PRECURSORS;

CATHODOLUMINESCENCE;

EID: 4344679502     PISSN: 13504487     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.radmeas.2003.12.016     Document Type: Conference Paper

References (7)

1. Fitting H.-J., Glaefeke H., Wild W. Electron penetration and energy transfer in solid targets. Phys. Status Solidi A. 43:1977;185-190.
2. 2 layers and the role of mobile oxygen in defect transformations J. Non-Cryst. Solids. 303:2002;218-231.
3. 2 glass Solid State Commun. 122:2002;117-120.
4. Magruder R.H., Weeks R.A., Weller R.A., Zuhr R.A. Effects of multi-energy Si and O ion implantation on the optical properties of silica. J. Non-Cryst. Solids. 304:2002;224-232.
5. 2 J. Non-Cryst. Solids. 167:1994;229-238.
6. Stevens Kalceff M.A. Cathodoluminescence microcharacterization of the defect structure of irradiated hydrated and anhydrated fused silicon dioxide. Phys. Rev. B. 57:1998;5674-5683.
7. Trukhin A.N., Goldberg M., Jansons J., Fitting H.-J., Tale I.A. Silicon dioxide thin film luminescence in comparison with bulk silica. J. Non-Cryst. Solids. 223:1998;114-122.