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Volumn , Issue , 2002, Pages 631-634

A 80dB-SNR ±1g fully-integrated biaxial linear accelerometer in a standard 0.5μm CMOS technology for high-sensitivity applications

Author keywords

[No Author keywords available]

Indexed keywords

CMOS TECHNOLOGY; DEVICE SENSITIVITY; EXTERNAL COMPONENTS; HIGH-SENSITIVITY; LINEAR ACCELEROMETERS; ON CHIPS; OUTPUT SIGNAL; SWITCHED CAPACITOR;

EID: 4344647050     PISSN: 19308833     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (8)

References (9)
  • 1
    • 0029251970 scopus 로고
    • A monolithic surface micromachined accelerometer with digital output
    • Feb
    • C. Lu, M. Lemkin, and B. E. Boser, "A monolithic surface micromachined accelerometer with digital output," in ISSCC Dig. Tech. Papers, Feb. 1995, pp. 160-161.
    • (1995) ISSCC Dig. Tech. Papers , pp. 160-161
    • Lu, C.1    Lemkin, M.2    Boser, B.E.3
  • 2
    • 0027987532 scopus 로고
    • A 15 b electromechanical sigma-delta converter for acceleration measurements
    • San Francisco, CA, Feb
    • T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon, and M. Degrauwe, "A 15 b electromechanical Sigma-Delta converter for acceleration measurements," in ISSCC Dig. Tech Papers, San Francisco, CA, Feb. 1994, pp. 160-161.
    • (1994) ISSCC Dig. Tech Papers , pp. 160-161
    • Smith, T.1    Nys, O.2    Chevroulet, M.3    Decoulon, Y.4    Degrauwe, M.5
  • 5
    • 0029234581 scopus 로고
    • An accelerometer interface circuit
    • Santa Clara, CA, May
    • C. J. Kemp and L. Spangler, "An accelerometer interface circuit," in CICC Dig. Tech. Papers, Santa Clara, CA, May 1995, pp. 345-348.
    • (1995) CICC Dig. Tech. Papers , pp. 345-348
    • Kemp, C.J.1    Spangler, L.2
  • 7
    • 0030110593 scopus 로고    scopus 로고
    • Surface micromachined accelerometers
    • Mar
    • B. E. Boser and R. T. Howe, "Surface micromachined accelerometers," IEEE J. Solid-State Circuits, vol. 31, pp. 366-375, Mar. 1996.
    • (1996) IEEE J. Solid-State Circuits , vol.31 , pp. 366-375
    • Boser, B.E.1    Howe, R.T.2
  • 8
    • 0029489783 scopus 로고
    • Embedded micromechanical devices for the monolithic integration of mEMS with cMOS
    • Dec
    • J. H. Smith, S. Montague, J. J. Sniegowski, J. R. Murray, and P. J. McWhorter, "Embedded micromechanical devices for the monolithic integration of MEMS with CMOS," in Proc. IEDM, Dec. 1995, pp. 609-612.
    • (1995) Proc. IEDM , pp. 609-612
    • Smith, J.H.1    Montague, S.2    Sniegowski, J.J.3    Murray, J.R.4    McWhorter, P.J.5
  • 9
    • 84893714912 scopus 로고    scopus 로고
    • ADXL202E: Low-Cost ±2g Dual-Axis Accelerometer with Duty Cycle Output
    • ADXL202E: Low-Cost ±2g Dual-Axis Accelerometer with Duty Cycle Output


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.