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Volumn 596, Issue , 2000, Pages 241-246
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Electrical properties of low-temperature processed PZT thin films with preferred orientations
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL ORIENTATION;
DEPOSITION;
ELECTRIC PROPERTIES;
FERROELECTRIC MATERIALS;
LEAD;
LOW TEMPERATURE OPERATIONS;
PLATINUM;
SILICA;
SILICON WAFERS;
STOICHIOMETRY;
THIN FILMS;
TITANIUM;
CHEMICAL SOLUTION DEPOSITION;
FERROELECTRIC LEAD ZIRCONATE TITANATE THIN FILMS;
MOLECULAR DESIGNED PRECURSOR SOLUTION;
LEAD COMPOUNDS;
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EID: 0033680519
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (15)
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References (14)
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