Micromachined SrTiO 3 single crystals as dielectrics for electrostatic doping of thin films

Applied Physics Letters

Volumn 85, Issue 6, 2004, Pages 997-999

  Bhattacharya, A ^a   Eblen Zayas, M ^a   Staley, N E ^a   Huber, W H ^a,b   Goldman, A M ^a  

^a University of Minnesota ^*  (United States)

^b GENERAL ELECTRIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITOR GEOMETRIES; DIFFERENTIAL DIELECTRIC FUNCTIONS; LATTICE MISMATCH; STRONTIUM TITANATE;

ABRASIVES; DIELECTRIC MATERIALS; DOPING (ADDITIVES); ELECTRIC FIELD EFFECTS; ELECTROSTATICS; EPITAXIAL GROWTH; ETCHING; INTEGRATION; LEAKAGE CURRENTS; LOW TEMPERATURE OPERATIONS; MICROMACHINING; MOSFET DEVICES; PHOTORESISTS; SINGLE CRYSTALS; THIN FILMS;

STRONTIUM COMPOUNDS;

EID: 4344615576     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1777415     Document Type: Article

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