Stretchable wavy metal interconnects

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1723-1725

  Jones, Joyelle ^a   Lacour, Stéphanie P ^a   Wagner, Sigurd ^a   Suo, Zhigang ^b  

^a Princeton University   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC STRIPES; MECHANICAL DEFORMATION; WAVY METAL INTERCONNECTS; WAVY METAL STRIPES;

ADHESION; DEFORMATION; DEPOSITION; ELASTIC MODULI; ELECTRIC CONDUCTIVITY; ELECTRONIC EQUIPMENT; GOLD COMPOUNDS; OPTICAL INTERCONNECTS; STRETCHING; SURFACE TOPOGRAPHY; TENSILE STRENGTH;

METALLIC FILMS;

EID: 4344610649     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1756879     Document Type: Conference Paper

References (7)

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