Some aspects on the mechanical analysis of micro-shutters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 210-220

  Fettig, Rainer K ^a   Kuhn, Jonathan L ^a   Harvey Moseley, S ^a   Kutyrev, Alexander S ^a   Orloff, Jon ^a   Lu, Shude ^a  

^a HUGHES STX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FRACTURE; ION BEAMS; MEMBRANES; MILLING (MACHINING); SILICON; STIFFNESS; STRENGTH OF MATERIALS; SYSTEMS ANALYSIS;

MICROSHUTTERS; SHUTTER BLADE;

CAMERA SHUTTERS;

EID: 0033352313     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)