ION BOMBARDMENT OF POLYIMIDE FILMS.

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1988, Pages 444-451

  Bachman, Bonnie J ^a   Vasile, Michael J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FILMS - ION IMPLANTATION; SPECTROSCOPY, X-RAY;

CARBONYL FUNCTIONALITY; ION BOMBARDMENT; ION DOSES; ION ENERGIES; X-RAY PHOTOELECTRON SPECTROSCOPY;

POLYIMIDES;

EID: 0023709501     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)