Direct electron beam writing of electro-optic polymer microring resonators

Optics Express

Volumn 16, Issue 9, 2008, Pages 6592-6599

  Sun, Haishan ^a   Chen, Antao ^a,b   Ulbricht, Benjamin C ^b   Davies, Joshua A ^b   Sullivan, Philip A ^b   Liao, Yi ^c   Dalton, Larry R ^a,b  

^a University of Washington   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

^c UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROOPTICAL DEVICES; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; POLYMER MATRIX; POLYMETHYL METHACRYLATES;

ELECTRO-OPTIC POLYMER; ELECTRON BEAM RESIST DEVELOPER; ELECTRON BEAM WRITING; POLYMER WAVEGUIDES;

ELECTRON BEAM LITHOGRAPHY;

POLYMER;

ARTICLE; CHEMISTRY; ELECTRON; INSTRUMENTATION; OPTICS; SPECTROSCOPY;

ELECTRONS; OPTICS; POLYMERS; SPECTRUM ANALYSIS;

EID: 43049118986     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.006592     Document Type: Article

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