Space- and time-resolved diagnostics of microwave plasma process used for hydrogenated amorphous carbon film coating of PET bottles

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 633-640

  Benedic F ^a   Duten, X ^a   Hassouni, K ^a   Boutroy, N ^b   Chomel, N ^b   Desoutter, L ^b  

^a UNIVERSITÉ PARIS 13   (France)

^b Blowing and Coating Division   (France)

Author keywords

Amorphous hydrogenated carbon; Gas diffusion barrier; Optical emission; Plasma CVD

Indexed keywords

AMORPHOUS CARBON; COATINGS; FREE RADICALS; OPTICAL EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES;

AMORPHOUS HYDROGENATED CARBON; GAS BARRIERS; GAS DIFFUSION BARRIERS; RADIATIVE SPECIES; TIME-RESOLVED DIAGNOSTICS;

PLASMAS;

EID: 43049117553     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.016     Document Type: Article

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