Characterization of BCN film after wet process for interconnection integration

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 669-672

  Watanabe, D ^b   Aoki, H ^a   Moriyama, R ^a   Mazumder, M K ^a   Kimura, C ^a   Sugino, T ^a  

^a OSAKA UNIVERSITY   (Japan)

^b DAIKIN INDUSTRIES LTD   (Japan)

Author keywords

BCN; FTIR; Interconnection; Low dielectric constant; LowK; Wet process; XPS

Indexed keywords

BORON NITRIDE; CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERCONNECTION NETWORKS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBON NITRIDE (BCN); INTERCONNECTION INTEGRATION; LOW DIELECTRIC CONSTANT; WET PROCESS;

THIN FILMS;

EID: 42949177658     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.029     Document Type: Article

References (17)

1. Morant C., Cáceres D., Sanz J.M., and Elizalde E. Diam. Relat. Mater. 16 (2007) 1441
2. Umeda S., Yuki T., Sugiyama T., and Sugino T. Diam. Relat. Mater. 13 (2004) 1135
3. Aono M., and Nitta S. Diam. Relat. Mater. 11 (2002) 1219
4. Sugiyama T., ai T.T., and Sugino T. Appl. Phys. Lett. 80 (2002) 4214
5. Kimura C., Okada K., Funakawa S., Sakata S., and Sugino T. Diam. Relat. Mater. 14 (2005) 719
6. Aoki H., Yamasaki S., and Aoto N. Ext. Abs. of Int. Conf. on Solid State Devices & Materials (SSDM) (1998) 282
7. Zhou Z.F., Bello I., Lei M.K., Li K.Y., Lee C.S., and Lee S.T. Surf. Coat. Technol. 128-129 (2000) 334
8. Rand M.J., and Roberts J.F. J. Electrochem. Soc. 115 (1968) 423
9. Nakamura K. J. Electrochem. Soc. 133 (1986) 1120
10. Yuzuriha T.H., and Hess D.W. Thin Solid Films 140 (1986) 199
11. Bath A., van der Put P.J., Bechet J.G.M., Schoonman J., and Lepley B. J. Appl. Phys. 70 (1991) 4366
12. Peng J., Zhang P., Guo Y., and Chen G.H. Mater. Lett. 29 (1996) 191
13. Zhng M., Nakayama Y., Miyazaki T., and Mune M. J. Appl. Phys. 85 (1996) 2904
14. Han H.X., and Feldman B.J. Solid State Commun. 65 (1988) 921
15. Brewer S.H., Allen A.M., Lappi S.E., Chasse T.L., Briggman K.A., Gorman C.B., and Franzen S. Langmuir 20 13 (2004)
16. Linss V., Hermann I., Schwarzer N., Kreissig U., and Richter F. Surf. Coat. Technol. 163-164 (2003) 220
17. Chien S.C., Chattopadhyay S., Chen L.C., Lin S.T., and Chen K.H. Diam. Relat. Mater. 12 (2003) 1463